Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

被引：70
|
作者：
Masuda, M
Sugioka, K
Cheng, Y
Hongo, T
Shihoyama, K
Takai, H
Miyamoto, I
Midorikawa, K
机构：
[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
[2] Sci Univ Tokyo, Fac Ind Sci & Technol, Dept Appl Elect, Chiba 2788510, Japan
[3] Tokyo Denki Univ, Dept Elect Engn, Chiyoda Ku, Tokyo 1018457, Japan
[4] HOYA Photon Corp, Toda, Saitama 3350027, Japan
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 78卷 / 07期
关键词：
Microstructure; Acid Solution; Flow Direction; Femtosecond Laser; Hollow Structure;
D O I：
10.1007/s00339-003-2447-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.
引用
收藏
页码：1029 / 1032
页数：4
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