共 50 条
- [2] Effects of sputtering power on Al doped ZnO thin films deposited by RF magnetron sputtering Gongneng Cailiao/Journal of Functional Materials, 2015, 46 (08): : 08028 - 08030
- [5] The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering Journal of Materials Science: Materials in Electronics, 2012, 23 : 1580 - 1586
- [9] Effects of in situ annealing on the properties of Al-doped ZnO thin films deposited by RF magnetron sputtering Journal of Materials Science: Materials in Electronics, 2014, 25 : 1589 - 1595