Ion-Beam Methods for High-Precision Processing of Optical Surfaces

被引：0
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作者：
I. G. Zabrodin
M. V. Zorina
I. A. Kas’kov
I. V. Malyshev
M. S. Mikhailenko
A. E. Pestov
N. N. Salashchenko
A. K. Chernyshev
N. I. Chkhalo
机构：
[1] Institute for Physics of Microstructures,
[2] Russian Academy of Sciences,undefined
来源：
Technical Physics | 2020年 / 65卷
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页码：1837 / 1845
页数：8
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