Some features of the formation of structure and properties of transition metal diboride and boronitride films

The formation of structure and the development of mechanical properties in films of transition metal diborides (MeB2) and boronitrides (MeBN) grown by rf magnetron sputtering have been studied. The most characteristic features are (i) the formation of a columnar structure and axial texture on (00.1) planes in MeB2 films grown by nonreactive magnetron sputtering and (ii) the formation of a composite that consists of a nanocrystalline MeB2 phase and an amorphous BN phase in films grown by the reactive sputtering in Ar + N2 gas mixtures.