Multiscale 3D X-ray imaging

被引：0
|
作者：
R. Joseph Kline
机构：
[1] National Institute of Standards and Technology,Materials Science and Engineering Division
来源：
Nature Electronics | 2019年 / 2卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A technique known as ptychographic X-ray laminography can image integrated circuits over large volumes and with a resolution of around 10 nm.
引用
收藏
页码：435 / 436
页数：1
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