Effects of temperature and pressure on the structural and optical properties of ZnO films grown by pulsed laser deposition

被引：0
|
作者：
Lei Zhao
ChangShan Xu
YuXue Liu
YiChun Liu
机构：
[1] Northeast Normal University,Center for Advanced Opto
来源：
Science China Technological Sciences | 2010年 / 53卷
关键词：
zinc oxide; film; pulsed laser deposition; optical properties;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
ZnO thin films were deposited on fused silica via pulsed laser deposition (PLD) at substrate temperatures from 300°C to 800°C and ambient oxygen pressures ranging from 10−2 mTorr to 240 mTorr. X-ray diffraction (XRD) and Raman spectra indicated that wurtzite ZnO was obtained in all cases. The highly c-oriented ZnO films were obtained for oxygen pressures above 11 mTorr. The room-temperature photoluminescence (PL) spectra demonstrated that all the films exhibited strong near-band-edge (NBE) emission, while deep-level (DL) emission was also observed in films deposited at oxygen pressures below 80 mTorr. From analysis of the XRD, Raman and photoluminescence PL data, an optimal condition was identified for the deposition of highly crystallized ZnO films.
引用
收藏
页码：317 / 321
页数：4
相关论文
共 50 条
  • [21] Effects of misfit strain on properties of ZnO films grown by pulsed laser deposition
    Park, MC
    Yoon, WH
    Lee, DH
    Myoung, JM
    Bae, SH
    Lee, SY
    Yun, I
    [J]. CURRENT ISSUES IN HETEROEPITAXIAL GROWTH-STRESS RELAXATION AND SELF ASSEMBLY, 2002, 696 : 99 - 104
  • [22] Optical and structural properties of epitaxial GaN films grown by pulsed laser deposition
    Huang, TF
    Marshall, A
    Spruytte, S
    Harris, JS
    [J]. JOURNAL OF CRYSTAL GROWTH, 1999, 200 (3-4) : 362 - 367
  • [23] Optical and structural properties of ZnO films deposited on GaAs by pulsed laser deposition
    Ryu, YR
    Zhu, S
    Budai, JD
    Chandrasekhar, HR
    Miceli, PF
    White, HW
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 88 (01) : 201 - 204
  • [24] Optical and structural properties of ZnO films deposited on GaAs by pulsed laser deposition
    [J]. 1600, American Institute of Physics Inc. (88):
  • [25] Investigation of structural and optical properties of ZnO thin films of different thickness grown by pulsed laser deposition method
    Kumar, Veeresh
    Singh, Shushant Kumar
    Sharma, Himanshu
    Kumar, Shalendra
    Banerjee, M. K.
    Vij, Ankush
    [J]. PHYSICA B-CONDENSED MATTER, 2019, 552 : 221 - 226
  • [26] Optical and micro-structural properties of ZnO thin films grown on silicon substrate by pulsed laser deposition
    He, JT
    Zhuang, HZ
    Xue, CS
    Tian, DS
    Wu, YX
    Xue, SB
    Hu, HJ
    [J]. JOURNAL OF RARE EARTHS, 2006, 24 : 26 - 28
  • [27] Optical and structural properties of ZnO nanorods grown by pulsed laser deposition without a catalyst
    V. E. Kaydashev
    E. M. Kaidashev
    M. Peres
    T. Monteiro
    M. R. Correia
    N. A. Sobolev
    [J]. Technical Physics, 2009, 54 : 1607 - 1611
  • [28] Optical and Structural Properties of ZnO Nanorods Grown by Pulsed Laser Deposition without a Catalyst
    Kaydashev, V. E.
    Kaidashev, E. M.
    Peres, M.
    Monteiro, T.
    Correia, M. R.
    Sobolev, N. A.
    [J]. TECHNICAL PHYSICS, 2009, 54 (11) : 1607 - 1611
  • [29] Effects of the oxygen pressure on the structural and optical properties of ZnBeMgO films prepared by pulsed laser deposition
    Yang, C.
    Li, X. M.
    Gao, X. D.
    Cao, X.
    Yang, R.
    Li, Y. Z.
    [J]. JOURNAL OF CRYSTAL GROWTH, 2010, 312 (07) : 978 - 981
  • [30] Optical, structural, and morphological characterisation of epitaxial ZnO films grown by pulsed-laser deposition
    Mosca, M.
    Macaluso, R.
    Cali, C.
    Butte, R.
    Nicolay, S.
    Feltin, E.
    Martin, D.
    Grandjean, N.
    [J]. THIN SOLID FILMS, 2013, 539 : 55 - 59
12345