Modeling of contact behavior between polishing pad and workpiece surface

The polishing pad is one of the most significant components within a polishing system. It influences both the material removal rate and the surface finish. Furthermore, the wear behavior of the polishing pad is responsible for the shape accuracy. Nevertheless despite extensive research activity in recent years, there are still gaps of knowledge in terms of the working principle of a polishing pad. In this paper, the contact behavior of a polishing pad (polyurethane foam) with the workpiece surface is examined. For this, the polishing pad is modeled using a finite-element modeling (FEM) program and the deformation by pressing it against the rigid workpiece surface is investigated. Consequently, the local tensions are calculated, which are the basis for the penetration depth and therefore also for the material removal rate. © German Academic Society for Production Engineering (WGP) 2007.