Design and fabrication of a flexible three-axial tactile sensor array based on polyimide micromachining

This paper describes the design and fabrication of a flexible three-axial tactile sensor array using advanced polyimide micromachining technologies. The tactile sensor array is comprised of sixteen micro force sensors and it measures 13 mm × 18 mm. Each micro force sensor has a square membrane and four strain gauges, and its force capacity is 0.6 N in the three-axial directions. The optimal positions of the strain gauges are determined by the strain distribution obtained form finite element analysis (FEA). The normal and shear forces are detected by combining responses from four thin-film metal strain gauges embedded in a polyimide membrane. In order to acquire force signals from individual micro force sensors, we fabricated a PCB based on a multiplexer, operational amplifier and microprocessor with CAN network function. The sensor array is tested from the evaluation system with a three-component load cell. The developed sensor array can be applied in robots’ fingertips, as well as to other electronic applications with three-axial force measurement and flexibility keyword requirements.