Status and trends in modern micro- and nanotechnologyAktueller Stand und Trends in der modernen Mikro- und Nanotechnologie

被引：0
|
作者：
H. Brückl
R. Hainberger
R. Heer
A. Köck
机构：
[1] ARC Seibersdorf research,
[2] Nano-System-Technologies,undefined
来源：
e & i Elektrotechnik und Informationstechnik | 2005年 / 122卷 / 12期
关键词：
microtechnology; nanotechnology; photonics; sensors; Mikrotechnologie; Nanotechnologie; Photonik; Sensorik;
D O I：
10.1007/BF03054375
中图分类号：
学科分类号：
摘要：
The recent development from micro- to nanotechnology enables new ideas and new physical effects to be implemented in both conventional and novel devices. Examples of fast developing fields in this context are electronic, photonic and magnetic components for sensor, memory, and logic applications. Optical lithography, the traditional path of patterning, is supplemented with sophisticated methods to access the nanoworld.
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页码：442 / 445
页数：3
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