Electrical properties of films grown on W and Mo substrates by titanium ion implantation in nitrogen atmosphere

被引：0
|
作者：
P. I. Ignatenko
M. Yu. Badekin
机构：
[1] Donetsk National University,
来源：
Inorganic Materials | 2005年 / 41卷
关键词：
Oxide; Atmosphere; Titanium; Tungsten; Molybdenum;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Films consisting of alternating nitride and oxide layers differing in phase composition and structure are grown on polycrystalline tungsten and molybdenum substrates by ion implantation. The resistivity and thermoelectric power of the films are measured as functions of temperature, and the temperature coefficient of their resistance is determined. The phase composition and electrical properties of the films are shown to be governed by the nitrogen-ion dose delivered to the titanium target.
引用
收藏
页码：243 / 246
页数：3
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