A Gas-Discharge Plasma Source for the Modification of the Potential on the Surface of an Insulator

被引：0
|
作者：
V. A. Shuvalov
A. I. Priimak
V. V. Gubin
N. M. Lazuchenkov
N. A. Tokmak
机构：
[1] National Academy of Sciences of Ukraine,Institute of Technical Mechanics
来源：
Instruments and Experimental Techniques | 2002年 / 45卷
关键词：
Physical Chemistry; Operating Characteristic; Charged Particle; Particle Concentration; Plasma Source;
D O I：
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中图分类号：
学科分类号：
摘要：
A gas-discharge source of low-temperature plasma with the charged particle concentration of 1011–1013 m–3 is described. The operating characteristics of the source are considered. Experiments showed that the developed plasma source can be effectively used for the soft (without breakdowns) neutralization of both surface and bulk excess charge accumulated by insulating materials.
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页码：277 / 280
页数：3
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