Using atomic-step-structured 6H-SiC(0001) surfaces for the calibration of nanotranslations in scanning probe microscopy

被引:0
|
作者
M. S. Dunaevskii
I. V. Makarenko
V. N. Petrov
A. A. Lebedev
S. P. Lebedev
A. N. Titkov
机构
[1] Russian Academy of Sciences,Ioffe Physico
来源
Technical Physics Letters | 2009年 / 35卷
关键词
68.55.J; 68.37.Ps;
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摘要
The silicon surfaces of 6H-SiC(0001) single crystals subjected to stepwise high-temperature annealing in vacuum have been studied by atomic force microscopy and scanning tunneling microscopy techniques. A special annealing procedure is proposed that yields a structured surface featuring regular atomicsmooth steps with heights of 0.75 and 1.5 nm. We propose using these structured crystal surfaces for calibrating vertical translations in scanning probe microscopes.
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页码:47 / 49
页数:2
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