Chemical assembly of a titanium oxide layer on microporous silica

被引:0
|
作者
E. A. Sosnov
T. S. Trubina
A. A. Malygin
机构
[1] St. Petersburg State Institute of Technology (Technical University),
来源
关键词
microporous silica; titanium oxide layer; atomic layer deposition;
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学科分类号
摘要
The chemical assembly of a titanium oxide coating on a regular microporous silica surface by the atomic layer deposition method was considered. The change in the pore structure of the matrix was estimated, and a model of the coating formation in microporous materials was proposed.
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页码:1786 / 1793
页数:7
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