Robust Design of a Bimetallic Micro Thermal Sensor Using Taguchi Method

被引：0
|
作者：
Alireza Akbarzadeh
Shahriar Kouravand
Behnam Moetakef Imani
机构：
[1] Ferdowsi University of Mashhad,Center of Excellence on Soft Computing and Intelligent Information Processing, Department of Mechanical Engineering
[2] Ferdowsi University of Mashhad,Department of Mechanical Engineering
来源：
Journal of Optimization Theory and Applications | 2013年 / 157卷
关键词：
MEMS; Thermal sensor; Optimization; Taguchi; ANOVA;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In this study, a performance optimization process for a bimetallic micro thermal sensor using the Taguchi quality engineering method is described. Sensor performance is obtained by simulating the theoretical model, which shows the effect of the beam deflection on capacitance during changes in temperature. Optimal parameter combinations are determined using Taguchi experimental design method with at least 90 % confidence level. The level of importance of the parameters on the sensor’s sensitivity is determined using the analysis of signal-to-noise ratio as well as analysis of variance. The improvement in S/N ratio is 29.47 dB, representing an increase of 29.74 times in sensitivity.
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页码：188 / 198
页数：10
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