Effect of La and Y on Crystallization Temperatures of Hafnia and Zirconia

被引：0
|
作者：
Sergey V. Ushakov
Crystalyn E. Brown
Alexandra Navrotsky
机构：
[1] University of California at Davis,Thermochemistry Facility and NEAT ORU
来源：
Journal of Materials Research | 2004年 / 19卷
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摘要：
Crystallization of amorphous Y- and La-doped HfO2 and ZrO2 nanophase powders was studied using thermal analysis and high-temperature x-ray diffraction. Substantial increase of crystallization temperature of amorphous hafnium and zirconium oxides could be achieved by alloying with La2O3. The crystallization temperature of Hf2La2O7 composition is higher than 900 °C, which makes it a candidate for advanced gate dielectrics. In contrast, Y-doping did not significantly raise the crystallization temperature.
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页码：693 / 696
页数：3
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