An Experimental Study of Fracture of LIGA Ni Micro-Electro-Mechanical Systems Thin Films

被引：0
|
作者：
Y. Yang
S. Allameh
B. Boyce
K.S. Chan
W.O. Soboyejo
机构：
[1] Princeton University,Department of Mechanical and Aerospace Engineering
[2] and Princeton Institute for the Science and Technologies of Materials,Department of Physics and Geology
[3] Northern Kentucky University,undefined
[4] Materials and Process Sciences Center,undefined
[5] Sandia National Laboratories,undefined
[6] Southwest Research Institute,undefined
来源：
Metallurgical and Materials Transactions A | 2007年 / 38卷
关键词：
Crack Front; CTOD; Compact Tension Specimen; Load Line Displacement; Slant Fracture;
D O I：
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中图分类号：
学科分类号：
摘要：
This article presents the results of an experimental study of fracture in LIGA Ni micro-electro-mechanical systems (MEMS) thin films. Microtesting techniques are developed for the study of the J-resistance curve (J-Δa) behavior in compact tension (CT) thin film specimens. In-situ measurements of crack-tip strain are presented together with in-situ and ex-situ microscopic images of crack-tip deformation and fracture mechanisms. Fractographic observation showed a mixture of inclined fracture planes (slant fracture) that are relatively featureless and normal fracture planes that exhibit dimples and microholes resulting from plastic deformation.
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页码：1223 / 1230
页数：7
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