Design and fabrication of integrated superconducting isolator-circulator-isolator chip

被引：0
|
作者：
Huang, Rutian [1 ,2 ]
Geng, Xiao [1 ,2 ]
Dai, Genting [1 ,2 ]
Yang, Liangliang [1 ,2 ]
Liu, Jianshe [1 ,2 ]
Chen, Wei [1 ,2 ,3 ]
机构：
[1] Tsinghua Univ, Sch Integrated Circuits, Lab Superconducting Quantum Informat Proc, Beijing 100084, Peoples R China
[2] Beijing Natl Res Ctr Informat Sci & Technol, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Beijing Innovat Ctr Future Chips, Beijing 100084, Peoples R China
来源：
MICROELECTRONIC ENGINEERING | 2022年 / 263卷
基金：
中国国家自然科学基金;
关键词：
Integrated chip; Isolator; Circulator; SQUID; Quantum computer; Design; Fabrication;
D O I：
10.1016/j.mee.2022.111844
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a design and fabrication of integrated superconducting Isolator-Circulator-Isolator (ICI) chip, which is able to act as isolator and circulator simultaneously. The ICI is composed of tunable inductor bridges which based on arrays of superconducting quantum interference devices (SQUIDs). The ICI is modeled and the microwave scattering parameters are simulated by Advanced Design System (c) software. The ICI chip works on the frequencies between 4 and 8 GHz, and at operation temperature about 20 mK, with isolation exceeds 40 dB and insertion loss less than 4 dB. A set of 10 layout masks are designed and the chip is fabricated based on self-aligned process of Josephson junctions. The ICI can help mitigate the interconnecting bottleneck of superconducting quantum computers.
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页数：8
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