Determination of an X-ray microprobe size

被引：0
|
作者：
Avrutin, VS [1 ]
Gartman, YM [1 ]
Zaitsev, SI [1 ]
Zuev, AP [1 ]
Izumskaya, NF [1 ]
Ushakov, NG [1 ]
Chukalina, MV [1 ]
机构：
[1] Russian Acad Sci, Inst Microelect & Highly Pure Mat Technol Problem, Chernogolovka 142432, Russia
来源：
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 1997年 / 61卷 / 10期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：1999 / 2002
页数：4
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