A Piezoelectric Two-Degree-of-Freedom Nanostepping Motor With Parallel Design

被引：27

作者：

Cheng, Chiao-Hua ^{[1
]}

Hung, Shao-Kang ^{[1
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 300, Taiwan

来源：

IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2016年 / 21卷 / 04期

关键词：

Inertiamotor; nanopositioner; piezoelectric element; stepping motor; stick-slip; IMPACT DRIVE MECHANISM; STEPPING MOTOR; MICROSCOPE; MOTION;

D O I：

10.1109/TMECH.2015.2502266

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This letter proposes a parallel design for a piezoelectric two-degree-of-freedom nanostepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serialmechanism, parallel designs are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04 degrees/infinite, respectively.

引用

页码：2197 / 2199

页数：3

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