Electron-stimulated desorption of negative O- ions from the oxidized O/Ru surface

被引：1
|
作者：
Potekhina, N. D. [1 ]
Solov'ev, S. M. [1 ]
机构：
[1] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia
来源：
PHYSICS OF THE SOLID STATE | 2010年 / 52卷 / 03期
关键词：
EXCITATION; PHOTON; MECHANISM; IMPACT; MO;
D O I：
10.1134/S1063783410030297
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
This paper reports on a study of the electron-stimulated desorption of negative oxygen ions from the O/Ru surface, which represents an additional factor responsible for the destruction of the protective oxide layer of the mirrors used in ultraviolet lithography. The cross section of degradation of the O/Ru layer due to the electron-stimulated desorption of the O+ and O- ions and the O atoms has been found to be 1.6 x 10(-19) cm(2). A comparison of the dependences of the electron-stimulated desorption yield of O+ and O- ions on the incident electron energy E with the ionization cross section of the adsorbate core level sigma (O2s) (E) has revealed that the ionization of the O 2s level is the main channel of the electron-stimulated desorption of O- ions.
引用
收藏
页码：649 / 656
页数：8
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