Performance of Molybdenum as a Mechanical Membrane for RF MEMS Switches

被引：19

作者：

Goldsmith, C. ^{[1
]}

Forehand, D. ^{[1
]}

Scarbrough, D. ^{[1
]}

Johnston, I. ^{[2
]}

Sampath, S. ^{[2
]}

Datta, A. ^{[2
]}

Peng, Z. ^{[3
]}

Palego, C. ^{[3
]}

Hwang, J. C. M. ^{[3
]}

机构：

[1] MEMtronics Corp, Plano, TX 75075 USA

[2] Innovat Micro Technol, Santa Barbara, CA 93117 USA

[3] Lehigh Univ, Bethlehem, PA 18015 USA

来源：

2009 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-3 | 2009年

关键词：

microelectromechanical systems; RF MEMS; MEMS switch; molybdenum; capacitive switch; temperature; TEMPERATURE;

D O I：

10.1109/MWSYM.2009.5165925

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article details the construction and measurement of RF MEMS capacitive switches using molybdenum as the mechanical material. The resulting switches exhibit a significantly reduced rate of change in actuation voltage over temperature, with rates less than 0.03 V/degrees C up to 150 degrees C. Resistivity of the molybdenum membranes averaged 10-11 mu Omega-cm, yielding an effective shunt resistance of less than 0.25 Omega. Initial cycling. measurements were made which show that the resulting membranes were capable of at least 20 billion cycles without failure, indicating that molybdenum is a promising mechanical material for constructing RF MEMS switches.

引用

页码：1229 / +

页数：2

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