Discrete-Time Modelling of Sigma-Delta Inspired Systems for MEMS

被引：0
|
作者：
Blokhina, E. [1 ]
Giounanlis, P. [1 ]
Dominguez-Pumar, M. [2 ]
Gorreta, S. [2 ]
Pons-Nin, J. [2 ]
Feely, O. [1 ]
机构：
[1] Univ Coll Dublin, Sch Elect Elect & Commun Engn, Dublin 2, Ireland
[2] Univ Politecn Cataluna, Micro & Nanotechnol Grp, Barcelona, Spain
来源：
NONLINEAR MAPS AND THEIR APPLICATIONS | 2015年
关键词：
PULSED DIGITAL OSCILLATORS; FORCE-FEEDBACK; ACCELEROMETERS; MODULATION; DYNAMICS; SENSOR; MODES;
D O I：
10.1007/978-3-319-12328-8_3
中图分类号：
O1 [数学];
学科分类号：
0701 ; 070101 ;
摘要：
This chapter discusses a variety of system structures for microelectrome-chanical systems (MEMS) that employ a feedback loop inspired by sigma-delta modulation. Sigma-delta modulators are classic electronic circuits that implement data conversion. The feedback loop typical for sigma-delta modulation can be applied to actuate a MEMS device or control its state. The dynamics of such systems are described by a set of discrete-time equations (map). We show how these maps can be derived for different examples of MEMS and highlight the dynamics that are universal for all examples.
引用
收藏
页码：37 / 67
页数：31
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