MEMS/NEMS technologies at Centro Ricerche Fiat

被引：0
|
作者：
Pizzi, Marco
Konyachkine, Valerian
Lambertini, Vito
Pira, Nello Li
Paderi, Marzia
Belforte, Luca
Pacifico, Michele
机构：
[1] Ctr Ric Fiat, Orbassano, TO, Italy
[2] Russian Acad Sci, Siberian Branch, Sobolev Inst, Novosibirsk, Russia
来源：
INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS | 2006年 / 36卷 / 04期
关键词：
microtechnologies; nanotechnologies; MEMS; NEMS; etching;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The research on micro and nanotechnologies at Centro Ricerche Fiat ranges from NEMS/MEMS, to microoptics, substrates nanostructuring, smart materials, to many different technologies for sensors, actuators, displays and miniaturised energy production and storage devices. Here we will describe two examples, SISA technology (Stress Induced Self Assembly) and its application to the fabrication of low cost M EMS IR spectrometers, and piezoelectric materials nanostructuring for adaptive photonic crystals and diffractive gratings.
引用
收藏
页码：177 / 184
页数：8
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