Angular and velocity distribution of nano-size cluster beams in a gas flow

被引:14
|
作者
Ganeva, M. [1 ]
Kashtanov, P. V. [2 ]
Smirnov, B. M. [2 ]
Hippler, R. [3 ]
机构
[1] Forschungszentrum Julich, MLZ, Julich Ctr Neutron Sci, D-85747 Garching, Germany
[2] Russian Acad Sci, Joint Inst High Temp, Moscow 125412, Russia
[3] Ernst Moritz Arndt Univ Greifswald, Inst Phys, D-17487 Greifswald, Germany
关键词
Gas flow expansion; Nanoparticle flow; Nano-size cluster beams; RAREFIED-GAS; MAGNETRON PLASMA; SIMULATION; GROWTH;
D O I
10.1016/j.vacuum.2014.08.019
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The present work analyzes the cluster relaxation in the gas beam for clusters formed in a gas aggregation nanocluster sources in the framework of the small transition region model. The model applied provides plausible values for cluster velocities which are in a good agreement with measured ones and in the fair agreement with simulated by other researchers. The effect of separation of clusters of different masses in the beam due to dependence of their transversal velocity on the cluster mass is also studied. (C) 2014 Elsevier Ltd. All rights reserved.
引用
收藏
页码:140 / 145
页数:6
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