The approaching revolution in X-ray microanalysis: The microcalorimeter energy dispersive spectrometer

被引：9
|
作者：
Newbury, DE
Wollman, DA
Hilton, GC
Irwin, KD
Bergren, NF
Rudman, DA
Martinis, JM
机构：
[1] Natl Inst Stand & Technol, Boulder, CO 80303 USA
[2] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
来源：
JOURNAL OF RADIOANALYTICAL AND NUCLEAR CHEMISTRY | 2000年 / 244卷 / 03期
关键词：
D O I：
10.1023/A:1006777606703
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A high-resolution energy-dispersive X-ray spectrometer (EDS) based on cryogenic microcalorimeter X-ray detectors has been developed for use in X-ray microanalysis. With an energy resolution of 3 eV at 1.5 keV, count rate of similar to 500 s(-1), and an effective collection area of similar to 5 mm(2) (using polycapillary X-ray optics), the microcalorimeter EDS combines many of the favorable qualities of commercially-available wavelength dispersive spectrometers (WDS) and semiconductor EDS. After describing the spectrometer system, we present several applications of microcalorimeter EDS to important microanalysis problems.
引用
收藏
页码：627 / 635
页数：9
相关论文
共 50 条
  • [1] The Approaching Revolution in X-Ray Microanalysis: The Microcalorimeter Energy Dispersive Spectrometer
    D. E. Newbury
    D. A. Wollman
    G. C. Hilton
    K. D. Irwin
    N. F. Bergren
    D. A. Rudman
    J. M. Martinis
    [J]. Journal of Radioanalytical and Nuclear Chemistry, 2000, 244 : 627 - 635
  • [2] High-resolution, energy-dispersive microcalorimeter spectrometer for X-ray microanalysis
    Wollman, DA
    Irwin, KD
    Hilton, GC
    Dulcie, LL
    Newbury, DE
    Martinis, JM
    [J]. JOURNAL OF MICROSCOPY-OXFORD, 1997, 188 : 196 - 223
  • [3] High-resolution microcalorimeter energy-dispersive spectrometer for x-ray microanalysis and particle analysis
    Wollman, DA
    Hilton, GC
    Irwin, KD
    Dulcie, LL
    Bergren, NF
    Newbury, DE
    Woo, KS
    Liu, BYH
    Diebold, AC
    Martinis, JM
    [J]. CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 1998, 449 : 799 - 804
  • [4] Lowering the limit of detection in high spatial resolution electron beam microanalysis with the microcalorimeter energy dispersive X-ray spectrometer
    Newbury, D
    Wollman, D
    Irwin, K
    Hilton, G
    Martinis, J
    [J]. ULTRAMICROSCOPY, 1999, 78 (1-4) : 73 - 88
  • [5] Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope
    Hara, Toru
    Tanaka, Keiichi
    Maehata, Keisuke
    Mitsuda, Kazuhisa
    Yamasaki, Noriko Y.
    Ohsaki, Mitsuaki
    Watanabe, Katsuaki
    Yu, Xiuzhen
    Ito, Takuji
    Yamanaka, Yoshihiro
    [J]. JOURNAL OF ELECTRON MICROSCOPY, 2010, 59 (01): : 17 - 26
  • [6] Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope
    Advanced Nano-Characterization Center, National Institute for Materials Science, 1-1 Namiki, Ibaraki, Tsukuba
    305-0044, Japan
    不详
    410-1393, Japan
    不详
    819-0395, Japan
    不详
    229-8510, Japan
    不详
    196-8558, Japan
    不详
    300-2611, Japan
    [J]. Microsc., 1 (17-26):
  • [7] Energy dispersive x-ray spectrometry with the transition edge sensor microcalorimeter: A revolutionary advance in materials microanalysis
    Newbury, D
    Wollman, D
    Irwin, K
    Hilton, G
    Martinis, J
    [J]. ADVANCES IN MATERIALS PROBLEM SOLVING WITH THE ELECTRON MICROSCOPE, 2001, 589 : 75 - 80
  • [8] Energy dispersive x-ray analysis using a microcalorimeter detector
    Harris, W
    Le Tarte, L
    Bakhru, H
    Gibson, W
    Wu, D
    Geer, RE
    Wollman, DA
    [J]. CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE, 2001, 550 : 412 - 415
  • [9] X-ray microanalysis of biological samples by high-resolution energy dispersive microcalorimeter spectrometer using a low-voltage scanning electron microscope
    Nakai, Izumi
    Baba, Yukari
    Tanaka, Keiichi
    Nakayama, Satoshi
    Hanashima, Minako
    Hokura, Akiko
    Homma, Yoshikazu
    [J]. CHEMISTRY LETTERS, 2008, 37 (03) : 304 - 305
  • [10] The X-Ray Microcalorimeter Spectrometer for the International X-Ray Observatory
    Kelley, R. L.
    Bandler, S. R.
    Doriese, W. B.
    Ezoe, Y.
    Fujimoto, R.
    Gottardi, L.
    den Hartog, R.
    den Herder, J-W
    Hoevers, H.
    Irwin, K.
    Ishisaki, Y.
    Kilbourne, C. A.
    de Korte, P.
    van der Kuur, J.
    Mitsuda, K.
    Ohashi, T.
    Piro, L.
    Porter, F. S.
    Sato, K.
    Shinozaki, K.
    Shirron, P.
    Smith, S. J.
    Takei, Y.
    Whitehouse, P.
    Yamasaki, N. Y.
    [J]. LOW TEMPERATURE DETECTORS LTD 13, 2009, 1185 : 757 - +
12345