MEMS High Temperature Gradient Sensor for Skin-Friction Measurements in Highly Turbulent Flows

被引：7

作者：

Ghouila-Houri, Cecile ^{[1
]}

Talbi, Abdelkrim ^{[1
]}

Viard, Romain ^{[2
,3
]}

Gallas, Quentin ^{[4
]}

Garnier, Eric ^{[5
]}

Molton, Pascal ^{[5
]}

Delva, Jerome ^{[4
]}

Merlen, Alain ^{[1
]}

Pernod, Philippe ^{[1
]}

机构：

[1] Univ Lille, Univ Polytech Hautsde France, CNRS, Cent Lille,Yncrea ISEN,IEMN,UMR 8520, F-59000 Lille, France

[2] Thurmelec, F-68840 Pulversheim, Cecile Ghouila, France

[3] JMH Concept, F-68100 Mulhouse, France

[4] Univ Lille, CNRS, Labo Mecan Fluides Lille Kampe Feriet, ONERA,Cent Lille,Arts & Metiers Inst Technol,UMR, F-59000 Lille, France

[5] Off Natl Etud & Rech Aerosp, French Aerosp Lab, DAAA, F-92190 Meudon, France

来源：

IEEE SENSORS JOURNAL | 2021年 / 21卷 / 08期

关键词：

Wires; Temperature measurement; Temperature sensors; Heating systems; Sensor phenomena and characterization; Key-words alphabetic order;

D O I：

10.1109/JSEN.2020.2991785

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents and discusses the results obtained with a MEMS (Micro-Electro-Mechanical System) high temperature gradient sensor for time-averaged and fluctuating skin-friction measurements in highly turbulent flows. Designed as a robust wall-mounted suspended hot-wire structure, the micro-sensor was made using conventional microfabrication techniques, compatible with microelectronics for designing integrated smart systems. Successfully implemented into two air wind tunnels, the sensor was tested in a large range of turbulent flows, with mainstream velocities going up to 270 m/s (Mach number of 0.79), which corresponds to the mean velocity of airliner cruise flights. The experiments demonstrated the wide dynamic range of the micro-sensor without reaching its limits. The micro-sensor thereby demonstrated its value for measuring turbulence in aerodynamic applications, being particularly suitable for aeronautics.

引用

页码：9749 / 9755

页数：7

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