Evaluation of response time in ball surface-acoustic-wave hydrogen sensor using digital quadrature detector

被引：21

作者：

Abe, Takuji ^{[1
]}

Iwata, Naoya

Tsuji, Toshihiro

Mihara, Tsuyoshi

Akao, Shingo

Noguchi, Kazuhiro

Nakaso, Noritaka

Sim, Dongyoun

Ebi, Yusuke

Fukiura, Takeshi

Tanaka, Hidekazu

Yamanaka, Kazushi

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Mat Proc, Sendai, Miyagi 9808579, Japan

[2] Toppan Printing Co Ltd, Sugito, Saitama 3458508, Japan

[3] Ball Semicond Inc, Allen, TX 75013 USA

[4] Yamatake Corp, Kanagawa 2518522, Japan

[5] JST CREST, Tokyo 1020075, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 7B期

关键词：

ball SAW device; hydrogen sensor; response time; quadrature detector;

D O I：

10.1143/JJAP.46.4726

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Hydrogen leak detection sensors must have high sensitivity and a short response time of 1 s or less. A ball surface-acoustic-wave (SAW) hydrogen sensor has a high sensitivity and can detect hydrogen in a very wide concentration range of 10 ppm to 100%. Moreover, a fast response can be expected because of the very thin sensitive film used. In this study, we developed a digital quadrature detector (DQD) to measure responses of less than 1 s, and measure phases in I ms intervals with excellent sensitivity. We evaluated the response time of the ball SAW hydrogen sensor where the signal was averaged 256 times in 0.256 s using the DQD. As a result, the response time was found to be 1 s or less for 3.0 vol % hydrogen gas in nitrogen.

引用

页码：4726 / 4728

页数：3

共 50 条

[1] Evaluation of response time in ball surface-acoustic-wave hydrogen sensor using digital quadrature detector
Abe, Takuji
Iwata, Naoya
Tsuji, Toshihiro
Mihara, Tsuyoshi
Akao, Shingo
Noguchi, Kazuhiro
Nakaso, Noritaka
Sim, Dongyoun
Ebi, Yusuke
Fukiura, Takeshi
Tanaka, Hidekazu
Yamanaka, Kazushi
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2007, 46 (7 B): : 4726 - 4728
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