共 50 条
- [31] Ionization of sputtered material in high power impulse magnetron sputtering plasmas-comparison of titanium, chromium and aluminum PLASMA SOURCES SCIENCE & TECHNOLOGY, 2023, 32 (06):
- [32] The use of segmented cathodes to determine the spoke current density distribution in high power impulse magnetron sputtering plasmas Bradley, James W. (j.w.bradley@liverpool.ac.uk), 1600, American Institute of Physics Inc. (117):
- [37] Transition between the discharge regimes of high power impulse magnetron sputtering and conventional direct current magnetron sputtering PLASMA SOURCES SCIENCE & TECHNOLOGY, 2009, 18 (04):
- [39] Operating modes and target erosion in high power impulse magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (04):
- [40] Modeling of high power impulse magnetron sputtering discharges with graphite target PLASMA SOURCES SCIENCE & TECHNOLOGY, 2021, 30 (11):