Molecular dynamics simulations of nanopore processing in a graphene sheet by using gas cluster ion beam

被引:27
|
作者
Inui, Norio [1 ]
Mochiji, Kozo [1 ]
Moritani, Kousuke [1 ]
Nakashima, Naoki [1 ]
机构
[1] Univ Hyogo, Grad Sch Engn, Himeji, Hyogo 6712280, Japan
来源
关键词
IMPACT;
D O I
10.1007/s00339-009-5528-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The formation of a nanopore in a graphene sheet by collision with an argon cluster is simulated using molecular dynamics method. The number of removed carbon atoms and the size of the nanopore are obtained as a function of the kinetic energy of the cluster. In contrast to nanosculpting with a monomer ion beam, the size of the nanopore that is created by one shot of the cluster varies because of the variety of atom configuration. However, the mean size of the nanopore can be controlled over a wide range only by changing the kinetic energy of the cluster. This implies that the cleaning and processing of the graphene sheet may be realized simultaneously by changing the acceleration energy of the cluster.
引用
收藏
页码:787 / 794
页数:8
相关论文
共 50 条
  • [31] Cluster ion beam processing
    Yamada, I
    [J]. PHYSICS AND CHEMISTRY OF CLUSTERS, 2001, 117 : 253 - 266
  • [32] Cluster ion beam processing
    Yamada, I
    Matsuo, J
    [J]. SOLID-STATE ELECTRONICS, 1998, 42 (05) : A27 - +
  • [33] Processing of graphene into a cantilever beam structure using a focused ion beam
    Matsui, Kazuma
    Takei, Yusuke
    Inaba, Akira
    Takahata, Tomoyuki
    Matsumoto, Kiyoshi
    Shimoyama, Isao
    [J]. MICRO & NANO LETTERS, 2016, 11 (11): : 670 - 674
  • [34] Evaluation of gas cluster ion beam processing for sealing of a porous dielectric
    Brongersma, SH
    Sherman, S
    Tabat, M
    Patz, M
    Beyer, G
    Travaly, Y
    Le, TQ
    Caluwaerts, R
    Hautala, J
    [J]. ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004), 2004, : 463 - 468
  • [35] Molecular dynamics studies of ion beam implantation and patterning of silicon: Effect of noble gas cluster formation
    Lively, Michael A.
    Bennett, Samuel X.
    Allain, Jean Paul
    [J]. PHYSICAL REVIEW B, 2018, 97 (23)
  • [36] MOLECULAR-DYNAMICS SIMULATIONS OF ION IMPACT ON A SUPPORTED RHODIUM CLUSTER
    DENOTTER, WK
    BRONGERSMA, HH
    FEIL, H
    [J]. SURFACE SCIENCE, 1994, 306 (1-2) : 215 - 226
  • [37] Molecular dynamics simulations of cluster ion implantation for shallow junction formation
    Aoki, T
    Takaoka, JMG
    Yamada, I
    [J]. APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2001, 576 : 967 - 970
  • [38] Molecular dynamics simulation of gas phase ion cluster formation
    Cabarcos, OM
    Lisy, JM
    [J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 1999, 185 : 883 - 903
  • [39] Molecular dynamics simulations of cluster nucleation during inert gas condensation
    Krasnochtchekov, P
    Averback, RS
    [J]. JOURNAL OF CHEMICAL PHYSICS, 2005, 122 (04):
  • [40] Theory of Polymer-Nanopore Interactions Refined Using Molecular Dynamics Simulations
    Balijepalli, Arvind
    Robertson, Joseph W. F.
    Reiner, Joseph E.
    Kasianowicz, John J.
    Pastor, Richard W.
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2013, 135 (18) : 7064 - 7072