A table-based time-domain simulation method for oversampled microelectromechanical systems

被引：2
|
作者：
Wu, JF [1 ]
Carley, LR [1 ]
机构：
[1] Carnegie Mellon Univ, ECE Dept, Pittsburgh, PA 15213 USA
来源：
2000 IEEE/ACM INTERNATIONAL WORKSHOP ON BEHAVIORAL MODELING AND SIMULATION, PROCEEDINGS | 2000年
关键词：
D O I：
10.1109/BMAS.2000.888362
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper describes a table-based behavioral modeling method and an efficient transient simulation method for oversampled MEMS systems. A system is represented by a set of coupled ordinary differential equations (ODEs) numerically described by table-based macromodels. Cubic spline interpolation is used to evaluate the model functions. The instant settling approximation and the explicit ODE solver are employed to enable efficient transient simulation. These methods are used to simulate a delta-sigma MEMS accelerometer and demonstrate high simulation efficiency.
引用
收藏
页码：37 / 41
页数：5
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