Planar Hall effect in the vertical Hall sensor

被引：18
|
作者：
Schott, C [1 ]
Besse, PA [1 ]
Popovic, RS [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, BM, IMS, CH-1015 Lausanne, Switzerland
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 85卷 / 1-3期
关键词：
magnetic field measurement; planar Hall effect; Hall transducer;
D O I：
10.1016/S0924-4247(00)00328-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The planar Hall effect is theoretically and experimentally studied in the vertical Hall sensor (VHS). Compared to silicon plate-shaped devices where experimental and theoretical value correspond well, the experimental value for the vertical Hall device is about 10 times smaller than theory predicts. This fact is explained by anisotropy effects and by the unique self-compensating structure of the device. Thus, magnetic field transducers built with devices of this structure are particularly adapted to the measurement of magnetic fields with more than one component. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：111 / 115
页数：5
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