Theoretical analysis of SAW propagation characteristics under the strained medium and applications for high temperature stable high coupling SAW substrates

被引:0
|
作者
Yamanouchi, K [1 ]
Kotani, K [1 ]
Odagawa, H [1 ]
Cho, Y [1 ]
机构
[1] Tohoku Inst Technol, Sendai, Miyagi 982, Japan
来源
1999 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 1999年
关键词
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
The important properties required for SAW substrates are a large electro-mechanical coupling coefficient (k(2)), small temperature coefficient of frequency (TCF), low propagation loss, etc. At present, there is no single crystal which satisfies all the above mentioned requirements. Recently the efforts to develop new SAW substrate with large k(2) and small TCF have investigated. New KNbO8 single crystal substrates with extremely large electromechanical coupling coefficient (k(2) 53%) and zero TCF around room temperature are developed. LiNbO8 has good properties as the SAW substrates with a large size. Unfortunately LiNbO8 possesses the defect of large values of TCP. In this paper, SAW bonded composite substrates with a large ka, small TCF, low propagation loss and no dispersion using conventional bonders are investigated theoretically and experimentally. The propagation characteristics of SAW in the strained piezoelectric crystal using the higher-order elasticity theory have been analyzed. The theoretical results show zero TCF on LiNbO8/SiO2 substrates, At room temperature a relatively thin LiNbO8 is firmly bonded to a glass material with a small thermal expansion coefficient by using ultra-violet rays stiffen bonder. The experimental results of LiNbO8/glass substrate showed TCF of-19ppm/degrees C. The propagation propertis were almost the same as those of the single crystal.
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页码:239 / 242
页数:4
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