Nanoscale imaging using deep ultraviolet digital holographic microscopy

被引：73

作者：

Faridian, Ahmad ^{[1
]}

Hopp, David ^{[1
]}

Pedrini, Giancarlo ^{[1
]}

Eigenthaler, Ulrike ^{[2
]}

Hirscher, Michael ^{[2
]}

Osten, Wolfgang ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany

[2] Max Planck Inst Met Res, D-70569 Stuttgart, Germany

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 13期

关键词：

SUPERRESOLUTION; RESOLUTION; LIMIT;

D O I：

10.1364/OE.18.014159

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup. (C) 2010 Optical Society of America

引用

页码：14159 / 14164

页数：6

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