Nanoscale imaging using deep ultraviolet digital holographic microscopy

被引：73
|
作者：
Faridian, Ahmad [1 ]
Hopp, David [1 ]
Pedrini, Giancarlo [1 ]
Eigenthaler, Ulrike [2 ]
Hirscher, Michael [2 ]
Osten, Wolfgang [1 ]
机构：
[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany
[2] Max Planck Inst Met Res, D-70569 Stuttgart, Germany
来源：
OPTICS EXPRESS | 2010年 / 18卷 / 13期
关键词：
SUPERRESOLUTION; RESOLUTION; LIMIT;
D O I：
10.1364/OE.18.014159
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup. (C) 2010 Optical Society of America
引用
收藏
页码：14159 / 14164
页数：6
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