共 50 条
- [15] Low temperature deposition of TaCN films using pentakis(diethylamido)tantalum ADVANCED METALLIZATION FOR FUTURE ULSI, 1996, 427 : 349 - 354
- [16] Low temperature deposition of TaCN films using pentakis(diethylamido)tantalum JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1998, 37 (1AB): : L30 - L32
- [20] LOW-TEMPERATURE DEPOSITION OF ALUMINA-SILICA FILMS PHILIPS RESEARCH REPORTS, 1966, 21 (05): : 379 - +