Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors

被引：38

作者：

Vallee, C. ^{[1
]}

Gonon, P. ^{[1
]}

Jorel, C. ^{[1
]}

El Kamel, F. ^{[2
]}

机构：

[1] Univ Grenoble 1, LTM, CEA, Leti,D2NT, F-38054 Grenoble 9, France

[2] El Manar Univ, Lab Org & Properties Mat LMOP, Tunis 1060, Tunisia

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 23期

关键词：

WORK-FUNCTION; OXIDE; HFO2;

D O I：

10.1063/1.3447795

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This work highlights the influence of the oxygen affinity of the metal electrodes used in high-k metal-insulator-metal capacitors. Several metallic electrodes are tested in order to investigate the role of the metal work function, and the role of the electrode oxygen-affinity in nonlinear behavior of HfO(2) and BaTiO(3) capacitors. It is shown that the magnitude of the quadratic coefficient of nonlinearity is better explained by the electrode oxygen-affinity rather than by its work function. It is thought that electrode oxidation increases the number of oxygen vacancies at the electrode/dielectric interface, and so increases the magnitude of nonlinearity. (C) 2010 American Institute of Physics. [doi:10.1063/1.3447795]

引用

页数：3

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