Development of PZT Thick Film Actuators for Active Micro-Optics

We present our ongoing research effort to establish PZT thick film actuators on LTCC and alumina substrates in active micro-optics. The main focus of this work lies in the challenges met in the miniaturization of cantilever actuators with special regard to the dielectric and electromechanical properties of the PZT thick film layer. We find that actuator structures down to 2 mm in width are feasible without adverse effects on the PZT layer. The principle challenge is the interaction of the PZT with the substrate in isolated elements. In the course of this investigation new design rules will be established. An actuator structure will be integrated with micro-lens arrays in collaboration with the Fraunhofer Institute for Applied Optics (IOF), Jena, Germany to build a flat cluster-eye microscope inspired by the visual system of insects.