Simulation of Thick Film PZT Actuators with Interdigitated Electrodes

被引：3
|
作者：
Zaki, Mohanad Mohammed [1 ]
Zaehringer, Sandy [1 ]
Schwesinger, Norbert [1 ]
机构：
[1] Tech Univ Munich, FG Mikrostrukturierte Mechatron Syst, D-80290 Munich, Germany
来源：
SMART SENSORS, ACTUATORS, AND MEMS VI | 2013年 / 8763卷
关键词：
Interdigitated electrodes; thick film; piezoelectric non-linearity; micro actuator; FEM-simulation;
D O I：
10.1117/12.2017411
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper deals with the simulation of membrane actuators based on thick film piezoelectric ceramics with interdigitated electrodes using the finite element method. A modified piezoelectric coupling matrix is introduced to account for the piezoelectric non-linearity due to poling and actuation at high electric fields. Electrodes were fabricated on top of 250 mu m thick PZT substrates which were characterized. The experimental data verified the simulation results and proved the necessity of the modified coupling matrix.
引用
收藏
页数：8
相关论文
共 50 条
  • [1] Integrated sensors for PZT actuators based on thick-film resistors
    Bergander, A
    Maeder, T
    Valencia, B
    Breguet, JM
    Ryser, P
    [J]. MHS2002: PROCEEDINGS OF THE 2002 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 2002, : 181 - 186
  • [2] High performance PZT thick film actuators using in plane polarisation
    Ernst, D.
    Bramlage, B.
    Gebhardt, S. E.
    Schoenecker, A. J.
    [J]. ADVANCES IN APPLIED CERAMICS, 2015, 114 (04) : 237 - 242
  • [3] Development of PZT Thick Film Actuators for Active Micro-Optics
    Bramlage, B.
    Gebhardt, S.
    [J]. ACTUATOR 10, CONFERENCE PROCEEDINGS, 2010, : 594 - 596
  • [4] Single-crystal film piezoelectric sensors, actuators and energy harvesters with interdigitated electrodes
    Hong, Y. K.
    Moon, K. S.
    Levy, M.
    Vanga, R. R.
    [J]. FERROELECTRICS, 2006, 342 : 1 - +
  • [5] Fabrication and transverse piezoelectric characteristics of PZT thick-film actuators on alumina substrates
    Sivanandan, K.
    Achuthan, Asha T.
    Kumar, V.
    Kanno, Isaku
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2008, 148 (01) : 134 - 137
  • [6] Enhanced Large Signal Performance of PZT Thick Film Actuators for Active Micro-Optics
    Ernst, Doerthe
    Bramlage, Bernhard
    Gebhardt, Sylvia
    Schoenecker, Andreas
    Pabst, Oliver
    Schreiner, Hans-Juergen
    [J]. 2013 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC AND WORKSHOP ON THE PIEZORESPONSE FORCE MICROSCOPY (ISAF/PFM), 2013, : 5 - 8
  • [7] Static/dynamic trade-off performance of PZT thick film micro-actuators
    Bienaime, Alex
    Chalvet, Vincent
    Clevy, Cedric
    Gauthier-Manuel, Ludovic
    Baron, Thomas
    Rakotondrabe, Micky
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (07)
  • [8] Effects of the material properties on piezoelectric PZT thick film micro cantilevers as sensors and self actuators
    Park, Jae Hong
    Kim, Hwan
    Yoon, Dae Sung
    Kwang, Soo Yoo
    Lee, Jinhyung
    Kim, Tae Song
    [J]. JOURNAL OF ELECTROCERAMICS, 2010, 25 (01) : 1 - 10
  • [9] Effects of the material properties on piezoelectric PZT thick film micro cantilevers as sensors and self actuators
    Jae Hong Park
    Hwan Kim
    Dae Sung Yoon
    Soo Yoo Kwang
    Jinhyung Lee
    Tae Song Kim
    [J]. Journal of Electroceramics, 2010, 25 : 1 - 10
  • [10] Direct torsion of bulk PZT using directional interdigitated electrodes
    Grinberg, Inbar
    Maccabi, Nadav
    Kassie, Adne
    Shmulevich, Shai
    Elata, David
    [J]. PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016, 2016, 168 : 1483 - 1487
12345