Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

被引：3
|
作者：
Chen, T [1 ]
Felix, D [1 ]
Park, SK [1 ]
Hauser, P [1 ]
McCarthy, B [1 ]
Sarid, D [1 ]
Poweleit, C [1 ]
Menendez, J [1 ]
Milster, T [1 ]
机构：
[1] Univ Arizona, Opt Sci Ctr, Tucson, AZ 85721 USA
来源：
OPTICAL DATA STORAGE 2004 | 2004年 / 5380卷
关键词：
near-field; solid immersion lens; microscopy; optical data storage;
D O I：
10.1117/12.557055
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200mn with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.
引用
收藏
页码：634 / 641
页数：8
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