On the stress distribution at scratching of thin film structures

被引:5
|
作者
Wredenberg, Fredrik [1 ]
Larsson, Per-Lennart [1 ]
机构
[1] Royal Inst Technol, Dept Solid Mech, S-10044 Stockholm, Sweden
基金
瑞典研究理事会;
关键词
Scratching; Film/substrate structures; Stress distribution; FEM analysis; Delamination; SENSITIVE HARD METALS; PYRAMID INDENTATION; CRITICAL RATIO; COATINGS; DELAMINATION; SIMULATION; THICKNESS; CRACKING; GROWTH; DEPTH;
D O I
10.1007/s11998-010-9242-9
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
Scratching of thin film/substrate structures is studied theoretically and numerically. In most cases, the material behavior of the film as well as the substrate is described by classical elastoplasticity accounting for large deformations; further, pressure-sensitive flow models are considered. The main efforts are devoted toward an understanding of the influence from the film/substrate boundary on the stress distribution at scratching but for comparative reasons, scratching of homogeneous materials are also studied and pertinent results presented. Among other things, the results are discussed in relation to delamination initiation and growth at scratching. The numerical investigation is performed using the finite element method, and the numerical strategy is discussed in some detail. The most important finding given by the present study is that high shear stresses are the main driving force for delamination initiation and growth along the film/substrate interface. It was also noted that the influence from pressure-sensitive flow on the stress fields related to delamination initiation is small, both quantitatively and qualitatively.
引用
收藏
页码:623 / 635
页数:13
相关论文
共 50 条
  • [41] THICKNESS DISTRIBUTION IN THIN-FILM
    HATTORI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (04) : 635 - 636
  • [42] Distribution of Kondo temperatures in a thin film
    Crépieux, A
    Lacroix, C
    PHYSICAL REVIEW B, 2000, 61 (10) : 6785 - 6789
  • [43] Thin-film stress monitoring
    Trego, L
    AEROSPACE ENGINEERING, 1996, 16 (09) : 36 - 36
  • [44] ANGULAR DISTRIBUTION OF ELECTRONS EMITTED FROM THIN-FILM MIM STRUCTURES AT VARIOUS TEMPERATURES
    HRACH, R
    MAY, J
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 4 (03): : 637 - &
  • [45] Distribution of local thermal residual stress in thin chips stacked by flip chip structures
    Miura, Hideo
    Ueta, Nobuki
    Sato, Yuhki
    2006 INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY CONFERENCE TAIWAN (IMPACT), PROCEEDINGS, 2006, : 143 - +
  • [46] NEUTRON-ACTIVATION ANALYSIS AND AN INVESTIGATION OF ELEMENT DISTRIBUTION IN THIN-FILM SEMICONDUCTOR STRUCTURES
    DUTOV, AG
    KOMAR, VA
    SHIRYAEV, SV
    LOBANOVA, KE
    ZABRODSKAYA, VV
    MOZHEIKO, LP
    JOURNAL OF ANALYTICAL CHEMISTRY, 1994, 49 (01) : 69 - 80
  • [47] TO CUT OR NOT TO CUT - A THERMOMECHANICAL STRESS-ANALYSIS OF POLYIMIDE THIN-FILM ON CERAMIC STRUCTURES
    PECHT, M
    WU, X
    PAIK, KW
    BHANDARKAR, SN
    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING, 1995, 18 (01): : 150 - 153
  • [48] Intrinsic strain modeling and residual stress analysis for thin-film processing of layered structures
    Nejhad, MNG
    Pan, CL
    Feng, HW
    JOURNAL OF ELECTRONIC PACKAGING, 2003, 125 (01) : 4 - 17
  • [49] Scratching properties of nickel-iron thin film and silicon using atomic force microscopy
    Tseng, Ampere A.
    Shirakashi, Jun-Ichi
    Nishimura, Shinya
    Miyashita, Kazuya
    Notargiacomo, Andrea
    Journal of Applied Physics, 2009, 106 (04):
  • [50] Scratching properties of nickel-iron thin film and silicon using atomic force microscopy
    Tseng, Ampere A.
    Shirakashi, Jun-ichi
    Nishimura, Shinya
    Miyashita, Kazuya
    Notargiacomo, Andrea
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (04)