8 Inches Monolithic CMOS-MEMS Manufacturing platforms for consumer products

被引：0
|
作者：
Soon, Wai Liew [1 ]
机构：
[1] Shanghai Huahong Grace Semicond Mfg Corp, 288 Halei Rd,Zhangjiang Hitech Pk, Shanghai 201203, Peoples R China
来源：
2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017) | 2017年
关键词：
MEMS; CMOS-MEMS; Sensor; wafer fabrication; CMOS foundry;
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
Huahong Grace Semiconductor Manufacturing Corporation (HHGrace) is the largest 8 inch wafer fabrication foundry in China with strong expertise in CMOS fabrication processes. By leveraging on the existing matured CMOS process capabilities, HHGrace has successfully developed MEMS platforms using existing equipments coupled with the combination of MEMS special tool sets. HHGrace has demonstrated its capabilities by providing MEMS customers with advanced monolithic CMOS-MEMS products in stable volume production. 3 majors MEMS platforms: Bulk MEMS, Surface MEMS and magnetic MEMS were developed to serve the major MEMS consumer products in the market.
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页数：4
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