(100) Three-Axis-Oriented BaTiO3 Thin Film with BaZrO3 Buffer Layer on MgO(100) Prepared by Chemical Solution Deposition Method

被引:3
|
作者
Hosokura, Tadasu [1 ]
Kageyama, Keisuke [1 ]
Takagi, Hiroshi [1 ]
Sakabe, Yukio [1 ]
机构
[1] Murata Mfg Co Ltd, Nagaokakyo, Kyoto 6178555, Japan
关键词
BARIUM-TITANATE;
D O I
10.1111/j.1551-2916.2009.03465.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
(100) three-axis-oriented BaTiO3 thin film with BaZrO3 buffer layer was prepared on an MgO(100) substrate by the chemical solution deposition method. The epitaxial growth of the (100) BaTiO3 layer was enabled by inducing a BaZrO3 bottom layer. Transmission electron microscopy revealed cube-on-cube epitaxial growth. The BaTiO3 thin film exhibited a (100) three-axis-orientation that followed the (100) orientation of the MgO substrate and the (100) orientation of the BaZrO3 bottom layer, as observed from an X-ray pole figure measurement and the selected area electron diffraction patterns.
引用
收藏
页码:630 / 633
页数:4
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