Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films

被引：6
|
作者：
Avilov, V. I. [1 ]
Ageev, O. A. [1 ]
Konoplev, B. G. [1 ]
Smirnov, V. A. [1 ]
Solodovnik, M. S. [1 ]
Tsukanova, O. G. [1 ]
机构：
[1] Southern Fed Univ, Inst Nanotechnol Elect & Equipment Engn, Taganrog 347928, Russia
来源：
SEMICONDUCTORS | 2016年 / 50卷 / 05期
基金：
俄罗斯基础研究基金会;
关键词：
Titanium Film; Titanium Hydride; Oxide Nanostructures; Titanium Thin Film; Local Anodic Oxidation;
D O I：
10.1134/S1063782616050043
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The results of experimental studies of the phase composition of oxide nanostructures formed by the local anodic oxidation of a titanium thin film are reported. The data of the phase analysis of titanium-oxide nanostructures are obtained by X-ray photoelectron spectroscopy in the ion profiling mode of measurements. It is established that the surface of titanium-oxide nanostructures 4.5 +/- 0.2 nm in height possesses a binding energy of core levels characteristic of TiO2 (458.4 eV). By analyzing the titanium-oxide nanostructures in depth by X-ray photoelectron spectroscopy, the formation of phases with binding energies of core levels characteristic of Ti2O3 (456.6 eV) and TiO (454.8 eV) is established. The results can be used in developing the technological processes of the formation of a future electronic-component base for nanoelectronics on the basis of titanium-oxide nanostructures and probe nanotechnologies.
引用
收藏
页码：601 / 606
页数：6
相关论文
共 50 条
  • [1] Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films
    V. I. Avilov
    O. A. Ageev
    B. G. Konoplev
    V. A. Smirnov
    M. S. Solodovnik
    O. G. Tsukanova
    Semiconductors, 2016, 50 : 601 - 606
  • [2] LOCAL ANODIC OXIDATION OF NANOSTRUCTURES
    Pravdova, Lenka
    Vujtek, Milan
    Kubinek, Roman
    NANOCON 2011, 2011, : 384 - 386
  • [3] Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film
    O. A. Ageev
    N. I. Alyab’eva
    B. G. Konoplev
    V. V. Polyakov
    V. A. Smirnov
    Semiconductors, 2010, 44 : 1703 - 1708
  • [4] Photoactivation of the Processes of Formation of Nanostructures by Local Anodic Oxidation of a Titanium Film
    Ageev, O. A.
    Alyab'eva, N. I.
    Konoplev, B. G.
    Polyakov, V. V.
    Smirnov, V. A.
    SEMICONDUCTORS, 2010, 44 (13) : 1703 - 1708
  • [5] Titanium oxide films produced on commercially pure titanium by anodic oxidation with different voltages
    Kuromoto, Neide K.
    Simao, Renata A.
    Soares, Gloria A.
    MATERIALS CHARACTERIZATION, 2007, 58 (02) : 114 - 121
  • [6] Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them
    K. N. Astankova
    A. S. Kozhukhov
    I. A. Azarov
    E. B. Gorokhov
    D. V. Sheglov
    A. V. Latyshev
    Physics of the Solid State, 2018, 60 : 700 - 704
  • [7] Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them
    Astankova, K. N.
    Kozhukhov, A. S.
    Azarov, I. A.
    Gorokhov, E. B.
    Sheglov, D. V.
    Latyshev, A. V.
    PHYSICS OF THE SOLID STATE, 2018, 60 (04) : 700 - 704
  • [8] Investigation of wear behavior of titanium oxide films, produced by anodic oxidation, on commercially pure titanium in vacuum conditions
    Yetim, A. F.
    SURFACE & COATINGS TECHNOLOGY, 2010, 205 (06): : 1757 - 1763
  • [9] Tribocorrosion behaviour of anodic titanium oxide films produced by plasma electrolytic oxidation for dental implants
    Alves, S. A.
    Bayon, R.
    Igartua, A.
    Saenz de Viteri, V.
    Rocha, L. A.
    LUBRICATION SCIENCE, 2014, 26 (7-8) : 500 - 513
  • [10] STUDY OF THE ANODIC-OXIDATION OF TITANIUM
    SCHMIDT, HK
    CAPELLADES, R
    VIDAL, MI
    REVUE TECHNIQUE THOMSON-CSF, 1982, 14 (03): : 657 - 670
12345