Perpendicular orientation of cylindrical domains upon solvent annealing thin films of polystyrene-b-polylactide

被引:71
|
作者
Vayer, Marylene [1 ]
Hillmyer, Marc A. [2 ]
Dirany, Mohammed [1 ]
Thevenin, Guillaume [1 ]
Erre, Rene [1 ]
Sinturel, Christophe [1 ]
机构
[1] Ctr Rech Matiere Divisee, F-45071 Orleans, France
[2] Univ Minnesota, Dept Chem, Minneapolis, MN 55455 USA
基金
美国国家科学基金会;
关键词
Polymer; Nanolithography; Atomic force microscopy; ABA BLOCK-COPOLYMERS; PHASE-BEHAVIOR; LITHOGRAPHY; TEMPLATES; POLYMERS; ARRAYS;
D O I
10.1016/j.tsf.2009.10.015
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Polystyrene-b-polylactide (PS-PLA) was employed as a precursor to nanoporous thin films containing perpendicular cylindrical channels. Cylinder-forming PS-PLA was spin coated onto Si substrate and solvent annealed using acetone, chlorobenzene and tetrahydrofuran (THF) for different durations. By atomic force microscopy, three types of final morphology were observed at the free surface of the films (PIA surface layer, perpendicular cylinders and parallel cylinders) depending on the type of solvent and annealing time. Well-organized perpendicular domains were obtained by annealing in THF. From this oriented PS-PLA annealed thin films, a mild hydrolysis led to a highly ordered array of perpendicularly-oriented cylindrical nanopores arranged on a hexagonal lattice, rendering the resulting nanoporous mask useful for nanopattern transfer processes. The weak resistance of the film/substrate interface during PLA etching was overcome by UV light exposure prior hydrolysis. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:3710 / 3715
页数:6
相关论文
共 50 条
  • [41] Controlling Domain Spacing and Grain Size in Cylindrical Block Copolymer Thin Films by Means of Thermal and Solvent Vapor Annealing
    Gu, Xiaodan
    Gunkel, Ilja
    Hexemer, Alexander
    Russell, Thomas P.
    MACROMOLECULES, 2016, 49 (09) : 3373 - 3381
  • [42] A paradigm shift in morphological architecture of PEO-b-PFOMA semi-fluorinated block copolymer thin films upon facile solvent annealing
    Islam, Mohammad Tariqul
    Islam, Md. Rafiqul
    Lim, Kwon Taek
    POLYMER, 2011, 52 (22) : 5212 - 5220
  • [43] Nd-Fe-B thin films with perpendicular magnetic anisotropy and high coercivity prepared by pulsed laser annealing
    Okuda, T
    Sugimura, A
    Eryu, O
    Serrona, LKEB
    Adachi, N
    Sakamoto, I
    Nakanishi, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (11): : 6859 - 6864
  • [44] Nd-Fe-B Thin Films with Perpendicular Magnetic Anisotropy and High Coercivity Prepared by Pulsed Laser Annealing
    Okuda, Takashi
    Sugimura, Akinori
    Eryu, Osamu
    Serrona, Leo Karl E.B.
    Adachi, Nobuyasu
    Sakamoto, Isao
    Nakanishi, Akio
    Okuda, T. (okudatks@mse.nitech.ac.jp), 1600, Japan Society of Applied Physics (42): : 6859 - 6864
  • [45] Morphology Development in Asymmetric Poly(styrene-b-tert-butylacrylate) Thin Films by Solvent Annealing
    Melvina Leolukman
    Young-Hye La
    Xuefa Li
    Padma Gopalan
    Polymer Journal, 2008, 40 : 825 - 831
  • [46] Morphology Development in Asymmetric Poly (styrene-b-tert-butylacrylate) Thin Films by Solvent Annealing
    Leolukman, Melvina
    La, Young-Hye
    Li, Xuefa
    Gopalan, Padma
    POLYMER JOURNAL, 2008, 40 (09) : 825 - 831
  • [47] Substrate-Independent Lamellar Orientation in High-Molecular-Weight Polystyrene-b-poly(methyl methacrylate) Films: Neutral Solvent Vapor and Thermal Annealing Effect
    Choi, Eunyoung
    Park, Sungmin
    Ahn, Hyungju
    Lee, Moongyu
    Bang, Joona
    Lee, Byeongdu
    Ryu, Du Yeol
    MACROMOLECULES, 2014, 47 (12) : 3969 - 3977
  • [48] Dewetting behavior of self-assembled films of polystyrene-b-poly(methyl methacrylate) induced by solvent vapor annealing
    Zuo, Jintao
    Wen, Gangyao
    You, Kun
    POLYMER, 2019, 185
  • [49] Dewetting Behavior of Langmuir-Blodgett Films of Polystyrene-b-Poly(Methyl Methacrylate) Induced by Solvent Vapor Annealing
    Wu, Tao
    Wen, Gangyao
    Huang, Changchun
    JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 2016, 54 (08) : 825 - 830
  • [50] Writing Highly Ordered Macroscopic Patterns in Cylindrical Block Polymer Thin Films via Raster Solvent Vapor Annealing and Soft Shear
    Luo, Ming
    Scott, Douglas M.
    Epps, Thomas H., III
    ACS MACRO LETTERS, 2015, 4 (05) : 516 - 520