OPTICAL ABSORPTION AND ELECTRICAL CONDUCTIVITY IN AMORPHOUS IN-ZN-O: A NEW TCO FOR CIGS PV

被引:0
|
作者
Perkins, J. D. [1 ]
Gennett, T. [1 ]
van Hest, M. F. A. M. [1 ]
Gedvilas, L. M. [1 ]
Ginley, D. S. [1 ]
机构
[1] Natl Renewable Energy Lab, Golden, CO 80401 USA
关键词
D O I
暂无
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
We report the coupled optical and electrical properties of a-IZO films as a function of both the metals composition and the %O(2) in the Ar/O(2) sputter gas mix. In particular, a-IZO films with conductivity sigma > 2000 S/cm can be grown for a broad range of metals compositions (60 to 85 at.% In) as long as the corresponding optimal oxygen level is used in the deposition. The amount of oxygen required increases with increasing indium content. When too much oxygen is used, the a-IZO remains clear but the conductivity is reduced due to a decreased carrier concentration. Whereas, when too little oxygen is used, the conductivity is reduced due to decreased electron mobility and there is a concurrent increase in the optical absorption from 400 to 1000 nm which renders the oxygen deficient a-IZO samples gray.
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页码:704 / 706
页数:3
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