Low-temperature epitaxial growth of high-quality GaON films on ZnO nanowires for superior photoelectrochemical water splitting

被引:27
|
作者
Ma, Hong-Ping [1 ]
Yang, Jia-He [1 ]
Tao, Jia-Jia [1 ]
Yuan, Kai-Ping [1 ]
Cheng, Pei-Hong [2 ]
Huang, Wei [1 ]
Wang, Jia-Cheng [3 ]
Guo, Qi-Xin [4 ]
Lu, Hong-Liang [1 ]
Zhang, David Wei [1 ]
机构
[1] Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[2] Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
[4] Saga Univ, Synchrotron Light Applicat Ctr, Dept Elect & Elect Engn, Saga 8408502, Japan
基金
中国博士后科学基金; 国家重点研发计划; 上海市自然科学基金; 中国国家自然科学基金;
关键词
Gallium oxynitride; Plasma-enhanced atomic layer deposition; Thickness-dependent photoelectrochemical performance; Epitaxial growth; Electric field intensity; ATOMIC LAYER DEPOSITION; VISIBLE-LIGHT-DRIVEN; SOLID-SOLUTION; STEP FABRICATION; PHOTOANODE; PHOTOCATALYST; ARRAYS; GAN; HYDROGEN; NANOPARTICLES;
D O I
10.1016/j.nanoen.2019.104089
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Gallium oxynitride (GaON) is an emerging material suitable as a key component to build efficient hetero-structures for photoelectrochemical (PEC) water splitting. However, the great difficulty in controlled growth of GaON films limits their applications. This study developed a novel method for depositing highly uniform GaON films by a one-step co-deposition process via plasma-enhanced atomic layer deposition (ALD). Importantly, this material presents high-quality epitaxial growth behavior on ZnO nanowires (NWs) only at 200 degrees C to construct ZnO-GaON core-shell NWs with different shell thickness (5-60 nm). Benefiting from the precisely controlled ALD technique, thickness-dependent PEC performance and its mechanism were studied deeply. It was found the ZnO-GaON NWs with an optimum shell thickness (similar to 40 nm) presented largest electric field enhancement and light-trapping ability, thus greatly improved the photocurrent from similar to 0.24 (pristine ZnO) to 2.25 mA/cm(2) at 1.23 V versus reversible hydrogen electrode. Meanwhile, this structure presents an ultrahigh incident photon-to-current conversion efficiency of similar to 90% in the UV region. A comparative study assesses the ultrahigh carrier density (similar to 10(21) cm(-3)) and suitable bandgap of GaON relative to GaN and Ga2O3, revealing a higher photocurrent for the ZnO-GaON core-shell NWs. These encouraging results indicated that higher PEC performance is worthy expected upon optimization of the nitrogen and oxygen concentrations and by combining with narrow bandgap materials in further studies.
引用
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页数:10
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