Discussion on method of optical surface roughness measurement

被引：3
|
作者：
Wang, Chunyang [1 ]
Lv, Dongmei [1 ]
Shi, Hongwei [1 ]
Liu, Xuelian [1 ]
Xin, Ruihao [1 ]
机构：
[1] Changchun Univ Sci & Technol, Coll Elect Informat Engn, Changchun 130000, Peoples R China
来源：
SECOND INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING | 2017年 / 10256卷
关键词：
surface roughness; Optical elements; Measurement; LIGHT-SCATTERING;
D O I：
10.1117/12.2260711
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In recent years, with the development of modern optics and laser technology, modern industry for optical surface roughness measurement precision of the increasingly high demand, real-time, fast and precise measurement of surface roughness has become constant subject of optical components in processing and test. In this paper, the current method of measuring the surface roughness of optical components were described in detail, including light scattering method, interferometric method, speckle method, and optical stylus method. Besides, the principles and characteristics of different methods were introduced respectively.
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页数：6
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