Soft X-ray laser ablation of nanometer-scale features

被引：0
|
作者：
Vaschenko, G.
Brizuela, F.
Bravo, H.
Menoni, C. S.
Rocca, J. J.
Hemberg, O.
Frazer, B.
Bloom, S.
Chao, W.
Anderson, E. H.
Attwood, D. T.
机构：
来源：
X-Ray Lasers 2006, Proceedings | 2007年 / 115卷
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We demonstrate single shot ablation of sub-100 nm holes using the focused output from a lambda=46.9 nm capillary discharge laser. Very clean ablation craters with diameters down to 82 nm were produced in polymethyl-methacrylate (PMMA) coated substrates placed at the first and third order focus of a free standing zone plate. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
引用
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页码：497 / 502
页数：6
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