64x64 Low-Loss and Broadband Digital Silicon Photonic MEMS Switches

被引:0
|
作者
Seok, Tae Joon [1 ]
Quack, Niels [1 ]
Han, Sangyoon [1 ]
Zhang, Wencong [1 ]
Muller, Richard S. [1 ]
Wu, Ming C. [1 ]
机构
[1] Univ Calif Berkeley, Berkeley, CA 94720 USA
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on monolithically integrated 64x64 broadband digital silicon photonic MEMS switches with sub-microsecond switching time (0.9 mu s), high extinction ratio (65 dB), low on-chip insertion loss (5.1 dB), broadband operation (1460-1580 nm wavelength) and compact footprint (7x7 mm(2)).
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页数:3
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