Observation of Stationary Plasma Striation and Collimated Plasma Transport in a 100-kHz Inductively Coupled Plasma Discharge

被引：6
|
作者：
Takahashi, Kazunori [1 ]
Ando, Akira [1 ]
机构：
[1] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 9808579, Japan
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2014年 / 42卷 / 10期
关键词：
ICP plasma; inverter power supply; plasma striation;
D O I：
10.1109/TPS.2014.2308893
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Inductively coupled plasma source connected to a diffusion vacuum chamber is operated with an inverter-type radio frequency (RF) power supply in 10-Pa argon. Plasma structure in the glass source tube is preliminarily studied by acquisition of digital images. A RF antenna is powered with a frequency of similar to 100 kHz, which is adjusted in order to optimize impedance matching condition. Near the RF antenna, the plasma production over the glass source tube diameter is observed, whereas the smaller diameter plasma transport and the stationary plasma striation structure are seen between the RF antenna and diffusion chamber.
引用
收藏
页码：2784 / 2785
页数：2
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